产品与服务 VOYAGER高性能电子束曝光系统
VOYAGER高性能电子束曝光系统
VOYAGER is a dedicated high-performance electron beam lithography system which is especially suitable wherever straightforward access to electron beam lithography in multi-user facilities is needed. The fully automated and ultra-ergonomic system with smart features and innovative system architecture ensures shortest time to result, making it suitable for both academic and industrial environments.