CIOE 2023Products & Services VOYAGER-High performance Electron Beam Lithography
VOYAGER-High performance Electron Beam Lithography
VOYAGER is a dedicated high-performance electron beam lithography system which is especially suitable wherever straightforward access to electron beam lithography in multi-user facilities is needed. The fully automated and ultra-ergonomic system with smart features and innovative system architecture ensures shortest time to result, making it suitable for both academic and industrial environments.
Further reading VOYAGER is a dedicated high-performance electron beam lithography system