CIOE 2023Products & Services VELION--FIB-SEM for FIB-centric nanofabrication
VELION--FIB-SEM for FIB-centric nanofabrication
VELION is a novel FIB-SEM instrument concept for nanoscale science and engineering. FIB nanofabrication is established as a standard technique for fabricating three-dimensional and high-resolution nanostructures such as plasmonic devices, nano-fluidics, localized implantation, and functionalization. VELION meets the demanding requirements of nanofabrication.
Further reading VELION is a novel FIB-SEM instrument concept for nanoscale science and engineering.