About us

ALPHA PLASMA is a globally operating supplier of microwave plasma systems to the semiconductor and optoelectronics industries. Long-term experience in sales and manufacturing makes Alpha Plasma an ideal partner for the rapidly changing world of electronics. We specialize in providing low pressure Advanced Microwave Plasma Technologies to both, the wafer fabrication and chip packaging industries. This includes MEMS fabrication, automotive electronics and optical communication technologies.

Alpha Plasma hereby teams up with a worldwide network of partners. In South East Asia and China, Asia is supported through our regional office in Singapore, Alpha Plasma Asia Pte Ltd , as well as through China-based companies. The product portfolio of Alpha Plasma comprises classic batch plasma systems as well as fully automated equipment for processing individual substrates, wafers and devices.The 5G Internet of Things drives us to the evolving market of optoelectronics. We provide dedicated solutions to our customers.

Products and services

At CIOE Shenzhen 2019 ALPHA PLASMA presents our portfolio of microwave plasma processes and solutions. We will discuss plasma cleaning applications OPTOELECTRONICS, PHOTONICS, LASER & SENSOR TECHNOLOGIES, LED AND IR APPLICATIONS. On display shall be our microwave systems AL 18 and our latest ASTRO PACTO. The AL18 is suitable for a wide spectrum of surface pre-treatments including surface activation and plasma polymerisation for adhesion improvement. The PACTO series has both standalone manual model or a fully automated robotic arm for loading/unloading of thin wafers and substrates. The PACTO can precisely control the temperature and etch rate of sensitive and critical wafer surfaces during treatment. A very strong point of ALPHA PLASMA is our Quartz Chamber type Q series providing damage-free wafer processing for photoresist stripping and descum.

Alpha Plasma System AL 18

ALPHA’s AL 18 is a versatile, table-top microwave plasma cleaner, featuring everything to run pilot line production or first-class R&D work, respectively. The chamber volume of 18 liters allows to process single layer substrate carriers as well as mini-batches of products. This microwave plasma tool by ALPHA also provides fast and damage-free plasma processing. Equipped with up to 4 gas lines Alpha Plasma’s AL 18 is well suited to clean WAFERS and all kind of electronic devices/substrates.


ALPHA ASTRO PACTO is our latest model uniquely designed for both manual and fully automated handling system for both wafers and chip packaging applications. With direct contact heating/ cooling chuck, the system is most suitable to process wafers that needs precision temperature control. With robotic arms, this system can handle up to 12” wafers. For chip packaging, this system handles up to 9 pcs of 100 mm wide lead frames. The ASTRO PACTO can also fit into an in-line production module.

ALPHA Plasma Microwave Cleaner AL 76 Compact

The ALPHA Plasma Microwave Cleaner AL 76 Compact Is truly an all-rounder. It’s special strength, however, is to clean high-brightness LED’s as well as wafers in MEMS production and niche markets. When equipped with Alpha’s unique ECR mode, AL 76 Compact is running 24/7 mass production in LED assembly. When equipped with a “hot” or “cold” wafer chuck, it is used for removal of SU-8 in MEMS technology as well as for the removal of other thick resists at unparalleled uniformity and etch rate.

Gewerbepark Markfeld 13
83043 Bad Aibling

Phone: +49 8061 937929-0
Fax: +49 8061 937929-8
Internet: www.alphaplasma.cn
E-mail: Send message

Contact person

Wolfgang Petasch
Owner / Manager
Phone: +49 151 40743961
E-mail: Send message

Alpha Plasma Asia Pte. Ltd.
50, Ubi Avenue 3, #05-17 Frontier
408866 Singapore
Rep. of Singapore

Phone: +65 62 580023
Fax: +65 62 584655
Internet: www.alphaplasma-asia.com
E-mail: Send message
Astronics Technologies Pte. Ltd.
No.88, 5th Jitai Road, Xiangnian Square, High Tech Zone
610095 Chengdu
P. R. China

Phone: +86 28 83352813
Internet: www.astronics.sg
E-mail: Send message

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